Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kishor Purushottam Gadkaree0
Richard Orr Maschmeyer0
Jeffrey Scott Cites0
Date of Patent
April 19, 2011
Patent Application Number
12369485
Date Filed
February 11, 2009
Patent Primary Examiner
Patent abstract
Disclosed are methods for making SOI and SOG structures using purified ion shower for implanting ions to the donor substrate. The purified ion shower provides expedient, efficient, low-cost and effective ion implantation while minimizing damage to the exfoliation film.
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