Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Juergen Frosien0
Date of Patent
May 10, 2011
Patent Application Number
12209079
Date Filed
September 11, 2008
Patent Primary Examiner
Patent abstract
The present invention provides a charged particle beam apparatus with a charged particle beam source including an emitter with an emitter tip; and supporting member for supporting the emitter. Further, the apparatus includes an emitter location-measuring device for repeatedly measuring the location of the emitter; and a deflector system for compensating variations in the location of the emitter.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
