US Patent 7939800 Arrangement and method for compensating emitter tip vibrations
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Patent abstract
The present invention provides a charged particle beam apparatus with a charged particle beam source including an emitter with an emitter tip; and supporting member for supporting the emitter. Further, the apparatus includes an emitter location-measuring device for repeatedly measuring the location of the emitter; and a deflector system for compensating variations in the location of the emitter.
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Patent Inventor Names
Juergen Frosien0
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US Patent 07939800 Arrangement and method for compensating emitter tip vibrations US Patent 7939800 Arrangement and method for compensating emitter tip vibrations
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Patent Number
07939800
Patent Number
7939800
Edits on 7 Dec, 2021
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US Patent 07939800 Arrangement and method for compensating emitter tip vibrations
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Patent jurisdiction
Patent number
07939800
Date of patent
May 10, 2011
Patent application number
12209079
Date Filed
September 11, 2008
Patent primary examiner
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