Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 10, 2011
Patent Application Number
11588489
Date Filed
October 26, 2006
Patent Primary Examiner
Patent abstract
This invention discloses a crystalline substrate based device including a crystalline substrate having formed thereon a microstructure; and at least one packaging layer which is sealed over the microstructure by means of an adhesive and defines therewith at least one gap between the crystalline substrate and the at least one packaging layer. A method of producing a crystalline substrate based device is also disclosed.
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