US Patent 7943886 Heat treatment apparatus
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Patent abstract
A heat treatment apparatus capable of ensuring a uniform temperature distribution on a substrate and reducing the generation of a sublimate includes a housing, a mounting table being arranged to move up and down within the housing, and a first heater being provided on the mounting table to heat a substrate placed on the mounting table, a second heater is provided on one side of the housing while an exhaust device is provided on the other side of the housing.
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Patent Inventor Names
Futoshi Shimai0
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US Patent 07943886 Heat treatment apparatus US Patent 7943886 Heat treatment apparatus
Infobox
Patent Number
079438860
Patent Number
79438860
Edits on 24 Apr, 2023
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Infobox
Is a
Patent Jurisdiction
Patent Number
079438860
Date of Patent
May 17, 2011
0Patent Application Number
117862030
Date Filed
April 11, 2007
0Patent Primary Examiner
Edits on 7 Dec, 2021
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US Patent 07943886 Heat treatment apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07943886
Date of patent
May 17, 2011
Patent application number
11786203
Date Filed
April 11, 2007
Patent primary examiner
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