Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 24, 2011
Patent Application Number
11543998
Date Filed
October 6, 2006
Patent Primary Examiner
Patent abstract
In an embodiment, an imprint lithography apparatus is disclosed that includes a support structure configured support an imprint template, the imprint template having a neutral plane which substantially bisects the imprint template, and an actuator located in a position such that, when the imprint template is supported by the support structure, the actuator is located between the support structure and a side of the imprint template, wherein the actuator is configured to meet the imprint template at a location which is displaced from the neutral plane of the imprint template.
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