US Patent 7946837 Imprint lithography
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Edits on 28 Nov, 2023
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Patent abstract
In an embodiment, an imprint lithography apparatus is disclosed that includes a support structure configured support an imprint template, the imprint template having a neutral plane which substantially bisects the imprint template, and an actuator located in a position such that, when the imprint template is supported by the support structure, the actuator is located between the support structure and a side of the imprint template, wherein the actuator is configured to meet the imprint template at a location which is displaced from the neutral plane of the imprint template.
Edits on 15 Jul, 2023
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US Patent 07946837 Imprint lithography US Patent 7946837 Imprint lithography
Infobox
Patent Number
0794683700
Patent Number
794683700
Edits on 1 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079468370
Date of Patent
May 24, 2011
0Patent Application Number
115439980
Date Filed
October 6, 2006
0Patent Primary Examiner
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079468370
Date of Patent
May 24, 2011
0Patent Application Number
115439980
Date Filed
October 6, 2006
0Patent Primary Examiner
Edits on 7 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07946837 Imprint lithography
Infobox
Is a
Patent jurisdiction
Patent number
07946837
Date of patent
May 24, 2011
Patent application number
11543998
Date Filed
October 6, 2006
Patent primary examiner
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