Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Karl-Josef Kramer0
Katrin Weilermann0
Date of Patent
May 31, 2011
0Patent Application Number
117185720
Date Filed
November 3, 2005
0Patent Primary Examiner
Patent abstract
The invention provides a rotatable and optionally heatable device for holding a flat substrate. The device includes a supporting means for placing and holding the substrate on a supporting surface, optionally a heater, a means for rotating the supporting means and a means for applying a fluid, e.g. a solvent, onto the side of the substrate facing the supporting surface. The fluid is applied when the supporting device for supporting and holding the substrate is caused to rotate.
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