US Patent 7950347 Rotatable device for holding a substrate
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Patent abstract
The invention provides a rotatable and optionally heatable device for holding a flat substrate. The device includes a supporting means for placing and holding the substrate on a supporting surface, optionally a heater, a means for rotating the supporting means and a means for applying a fluid, e.g. a solvent, onto the side of the substrate facing the supporting surface. The fluid is applied when the supporting device for supporting and holding the substrate is caused to rotate.
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Patent Inventor Names
Karl-Josef Kramer0
Katrin Weilermann0
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US Patent 07950347 Rotatable device for holding a substrate US Patent 7950347 Rotatable device for holding a substrate
Infobox
Patent Number
079503470
Patent Number
79503470
Edits on 22 Apr, 2023
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Infobox
Is a
Patent Jurisdiction
Patent Number
079503470
Date of Patent
May 31, 2011
0Patent Application Number
117185720
Date Filed
November 3, 2005
0Patent Primary Examiner
Edits on 7 Dec, 2021
Golden AI
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Infobox (+7 properties)
US Patent 07950347 Rotatable device for holding a substrate
Infobox
Is a
Patent jurisdiction
Patent number
07950347
Date of patent
May 31, 2011
Patent application number
11718572
Date Filed
November 3, 2005
Patent primary examiner
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