Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Andrew J. Nagengast0
Steven M. Zuniga0
Jeonghoon Oh0
Date of Patent
May 31, 2011
Patent Application Number
12791808
Date Filed
June 1, 2010
Patent Citations Received
Patent Primary Examiner
Patent abstract
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
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