US Patent 7950985 Flexible membrane for carrier head
Patent 7950985 was granted and assigned to Applied Materials on May, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
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Patent Inventor Names
Andrew J. Nagengast0
Jeonghoon Oh0
Steven M. Zuniga0
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US Patent 07950985 Flexible membrane for carrier head US Patent 7950985 Flexible membrane for carrier head
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Patent Number
07950985
Patent Number
7950985
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US Patent 07950985 Flexible membrane for carrier head
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Is a
Current assignee
Patent jurisdiction
Patent number
07950985
Date of patent
May 31, 2011
Patent application number
12791808
Date Filed
June 1, 2010
Patent primary examiner
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