Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Gary C. Barrett0
Bradley D. Bucher0
Colin L. Carr0
Date of Patent
June 7, 2011
Patent Application Number
12621393
Date Filed
November 18, 2009
Patent Primary Examiner
Patent abstract
The invention provides a method for recycling/reclaiming a monitor or test wafer and a method for testing an integrated circuit manufacturing process. After a monitor wafer has been used for testing one or more semiconductor wafer processing steps to determine adequacy for use with production wafers, deposited materials and other residues from the tested processing steps are removed, and the stripped wafer is subjected to a thermal anneal to repair defects in its surface and return it to a reusable condition.
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