US Patent 7955956 Method for recycling/reclaiming a monitor wafer
Patent 7955956 was granted and assigned to Texas Instruments on June, 2011 by the United States Patent and Trademark Office.
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Patent abstract
The invention provides a method for recycling/reclaiming a monitor or test wafer and a method for testing an integrated circuit manufacturing process. After a monitor wafer has been used for testing one or more semiconductor wafer processing steps to determine adequacy for use with production wafers, deposited materials and other residues from the tested processing steps are removed, and the stripped wafer is subjected to a thermal anneal to repair defects in its surface and return it to a reusable condition.
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Patent Inventor Names
Bradley D. Bucher0
Colin L. Carr0
Gary C. Barrett0
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US Patent 07955956 Method for recycling/reclaiming a monitor wafer US Patent 7955956 Method for recycling/reclaiming a monitor wafer
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Patent Number
07955956
Patent Number
7955956
Edits on 7 Dec, 2021
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US Patent 07955956 Method for recycling/reclaiming a monitor wafer
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Is a
Current assignee
Patent jurisdiction
Patent number
07955956
Date of patent
June 7, 2011
Patent application number
12621393
Date Filed
November 18, 2009
Patent primary examiner
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