Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 14, 2011
Patent Application Number
11517812
Date Filed
September 8, 2006
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
This invention provides methods for fabricating high speed TFTs from silicon-on-insulator and bulk single crystal semiconductor substrates, such as Si(100) and Si(110) substrates. The TFTs may be designed to have a maximum frequency of oscillation of 3 GHz, or better.
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