US Patent 7966968 Electroless plating apparatus with non-liquid heating source
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Edits on 28 Nov, 2023
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Patent abstract
An electroless plating apparatus is provided. The electroless plating apparatus includes a wafer holder; a chemical dispensing nozzle over the wafer holder; a conduit connected to the chemical dispensing nozzle; and a radiation source over the wafer holder.
Edits on 14 Jul, 2023
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US Patent 07966968 Electroless plating apparatus with non-liquid heating source US Patent 7966968 Electroless plating apparatus with non-liquid heating source
Infobox
Patent Number
0796696800
Patent Number
796696800
Edits on 26 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079669680
Date of Patent
June 28, 2011
0Patent Application Number
117962010
Date Filed
April 27, 2007
0Patent Primary Examiner
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079669680
Date of Patent
June 28, 2011
0Patent Application Number
117962010
Date Filed
April 27, 2007
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07966968 Electroless plating apparatus with non-liquid heating source
Infobox
Is a
Patent jurisdiction
Patent number
07966968
Date of patent
June 28, 2011
Patent application number
11796201
Date Filed
April 27, 2007
Patent primary examiner
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