Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hajime Nakano0
Takao Maeda0
Toshihiko Tsukatani0
Date of Patent
June 28, 2011
0Patent Application Number
115509290
Date Filed
October 19, 2006
0Patent Citations Received
0
0
Patent Primary Examiner
Patent abstract
A corrosion resistant member to be exposed to a halogen-containing gas atmosphere or a halogen-containing gas plasma atmosphere, comprising a substrate and a plurality of layers deposited thereon including a layer of rare earth fluoride providing the outermost surface and a layer of rare earth oxide having a porosity of less than 5% underlying the rare earth fluoride layer.
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