Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 12, 2011
Patent Application Number
11919877
Date Filed
May 19, 2006
Patent Primary Examiner
Patent abstract
An MEMS element (A1) includes a substrate (1), and a first electrode (2) formed on the substrate (1). The MEMS element (A1) further includes a second electrode (3) including a movable portion (31) spaced from the first electrode (2) and facing the first electrode. The movable portion (31) is formed with a plurality of through-holes (31a). Each of the through-holes (31a) may have a rectangular cross section.
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