US Patent 7977757 MEMS element, MEMS device and MEMS element manufacturing method
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Patent abstract
An MEMS element (A1) includes a substrate (1), and a first electrode (2) formed on the substrate (1). The MEMS element (A1) further includes a second electrode (3) including a movable portion (31) spaced from the first electrode (2) and facing the first electrode. The movable portion (31) is formed with a plurality of through-holes (31a). Each of the through-holes (31a) may have a rectangular cross section.
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US Patent 07977757 MEMS element, MEMS device and MEMS element manufacturing method US Patent 7977757 MEMS element, MEMS device and MEMS element manufacturing method
Infobox
Patent Number
0797775700
Patent Number
797775700
Edits on 26 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079777570
Date of Patent
July 12, 2011
0Patent Application Number
119198770
Date Filed
May 19, 2006
0Patent Primary Examiner
Edits on 28 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079777570
Date of Patent
July 12, 2011
0Patent Application Number
119198770
Date Filed
May 19, 2006
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07977757 MEMS element, MEMS device and MEMS element manufacturing method
Infobox
Is a
Patent jurisdiction
Patent number
07977757
Date of patent
July 12, 2011
Patent application number
11919877
Date Filed
May 19, 2006
Patent primary examiner
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