US Patent 7985674 SiH
Patent 7985674 was granted and assigned to Spansion on July, 2011 by the United States Patent and Trademark Office.
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Patent abstract
Prior to deposition of a silicon nitride (SiN) layer on a structure, a non-plasma enhanced operation is undertaken wherein the structure is exposed to silane (SiH4) flow, reducing the overall exposure of the structure to hydrogen radicals. This results in the silicon nitride being strongly bonded to the structure and in improved performance.
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Patent Inventor Names
Alexander Nickel0
Hieu Trung Pham0
Masato Tsuboi0
Minh-Van Ngo0
Shinich Imada0
Sung Jin Kim0
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US Patent 07985674 SiH US Patent 7985674 SiH
Infobox
Patent Number
079856740
Patent Number
79856740
Edits on 27 Apr, 2023
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079856740
Date of Patent
July 26, 2011
0Patent Application Number
122909160
Date Filed
November 5, 2008
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
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Infobox (+8 properties)
US Patent 07985674 SiH
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07985674
Date of patent
July 26, 2011
Patent application number
12290916
Date Filed
November 5, 2008
Patent primary examiner
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