Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akira Sato0
Toru Watanabe0
Takeshi Mori0
Shogo Inaba0
Date of Patent
August 2, 2011
0Patent Application Number
129817470
Date Filed
December 30, 2010
0Patent Primary Examiner
Patent abstract
A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.
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