US Patent 7989905 MEMS device having a movable electrode
Patent 7989905 was granted and assigned to Seiko Epson on August, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 30, 2010
0
Date of Patent
August 2, 2011
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Patent Application Number
12981747
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Patent Inventor Names
Akira Sato
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Toru Watanabe
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Takeshi Mori
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Shogo Inaba
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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