US Patent 7999210 Heating device for manufacturing semiconductor
Patent 7999210 was granted and assigned to Sumitomo Electric Industries on August, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A heating device for manufacturing semiconductor capable of uniformly heating a wafer or other materials to be treated, and in particular a heating device in a coater-developer used for heat-hardening of resin film for photolithography and for heat-calcining of low-dielectric constant insulating film, is provided.
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Patent Inventor Names
Akira Kuibira0
Hirohiko Nakata0
Masuhiro Natsuhara0
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US Patent 07999210 Heating device for manufacturing semiconductor US Patent 7999210 Heating device for manufacturing semiconductor
Infobox
Patent Number
079992100
Patent Number
79992100
Edits on 28 Mar, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079992100
Date of Patent
August 16, 2011
0Patent Application Number
104891740
Date Filed
February 26, 2003
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 07999210 Heating device for manufacturing semiconductor
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07999210
Date of patent
August 16, 2011
Patent application number
10489174
Date Filed
February 26, 2003
Patent primary examiner
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