Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sander Frederik Wuister0
Yvonne Wendela Kruijt-Stegeman0
Anke Pierik0
Antonius Johannes Joseph Wismans0
Johan Frederik Dijksman0
Martin Maurice Vernhout0
Date of Patent
August 23, 2011
0Patent Application Number
113943340
Date Filed
March 31, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An imprint lithography apparatus is disclosed. The apparatus has a substrate table configured to support a lithographic substrate and a plurality of nozzles arranged to eject fluid onto the lithographic substrate, the plurality of nozzles extending over a distance which is substantially equal to or greater than a width of the substrate, wherein the nozzles, the lithographic substrate, or both, are moveable relative to the other.
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