US Patent 8001924 Imprint lithography
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Patent abstract
An imprint lithography apparatus is disclosed. The apparatus has a substrate table configured to support a lithographic substrate and a plurality of nozzles arranged to eject fluid onto the lithographic substrate, the plurality of nozzles extending over a distance which is substantially equal to or greater than a width of the substrate, wherein the nozzles, the lithographic substrate, or both, are moveable relative to the other.
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Patent Inventor Names
Anke Pierik0
Antonius Johannes Joseph Wismans0
Johan Frederik Dijksman0
Martin Maurice Vernhout0
Sander Frederik Wuister0
Yvonne Wendela Kruijt-Stegeman0
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US Patent 08001924 Imprint lithography US Patent 8001924 Imprint lithography
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Patent Number
080019240
Patent Number
80019240
Edits on 30 Apr, 2023
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Is a
Patent Jurisdiction
Patent Number
080019240
Date of Patent
August 23, 2011
0Patent Application Number
113943340
Date Filed
March 31, 2006
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 08001924 Imprint lithography
Infobox
Is a
Patent jurisdiction
Patent number
08001924
Date of patent
August 23, 2011
Patent application number
11394334
Date Filed
March 31, 2006
Patent primary examiner
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