Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zhongwei Chen0
Kenichi Kanai0
Weiming Ren0
Xuedong Liu0
Date of Patent
August 23, 2011
0Patent Application Number
126360070
Date Filed
December 11, 2009
0Patent Primary Examiner
Patent abstract
The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.
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