US Patent 8003953 Multi-axis magnetic lens
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Patent abstract
The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.
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Patent Inventor Names
Kenichi Kanai0
Weiming Ren0
Xuedong Liu0
Zhongwei Chen0
Edits on 18 May, 2023
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US Patent 08003953 Multi-axis magnetic lens US Patent 8003953 Multi-axis magnetic lens
Infobox
Patent Number
080039530
Patent Number
80039530
Edits on 25 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
080039530
Date of Patent
August 23, 2011
0Patent Application Number
126360070
Date Filed
December 11, 2009
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 08003953 Multi-axis magnetic lens
Infobox
Is a
Patent jurisdiction
Patent number
08003953
Date of patent
August 23, 2011
Patent application number
12636007
Date Filed
December 11, 2009
Patent primary examiner
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