Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Cem Basceri0
Gurtej Sandhu0
Date of Patent
September 6, 2011
Patent Application Number
12232913
Date Filed
September 25, 2008
Patent Primary Examiner
Patent abstract
High resolution patterns provided on a surface of a semiconductor substrate and methods of direct printing of such high resolution patterns are disclosed. The high resolution patterns may have dimensions less than 0.1 micron and are formed by a direct writing method employing a supercritical fluid comprising nanometer-sized particles, which may be optionally electrically charged.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
