US Patent 8030216 Method of making semiconductor device
Patent 8030216 was granted and assigned to Tokyo Electron on October, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 13, 2008
Date of Patent
October 4, 2011
Patent Application Number
12139029
Patent Citations Received
Patent Inventor Names
Naoto Umehara
0
Shinichi Kozuka
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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