Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Richard Pham0
Aaron Radomski0
Carl Ioriatti0
David J. Coumou0
Larry J. Fisk, II0
Paul Eyerman0
William Stenglein0
Date of Patent
October 18, 2011
0Patent Application Number
123662740
Date Filed
February 5, 2009
0Patent Citations Received
0
0
...
Patent Primary Examiner
Patent abstract
A radio frequency (RF) system includes a control module that allocates M predetermined frequency intervals. The system also includes N RF sources that each applies first RF power to electrodes within a plasma chamber at frequencies within an assigned respective one of the M predetermined frequency intervals. The N RF sources also each respond to second RF power including feedback from the plasma chamber. The N RF sources each include a processing module that adjusts the first RF power based on the second RF power and the respective one of the M predetermined frequency intervals. M and N are integers greater than 1.
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