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US Patent 8108805 Simplified micro-bridging and roughness analysis

Patent 8108805 was granted and assigned to Tokyo Electron on January, 2012 by the United States Patent and Trademark Office.

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Patent abstract

The invention provides apparatus and methods for processing substrates using pooled statistically based variance data. The statistically based variance data can include Pooled Polymer De-protection Variance (PPDV) data that can be used to determine micro-bridging defect data, LER defect data, and LWR defect data.

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