US Patent 8108805 Simplified micro-bridging and roughness analysis
Patent 8108805 was granted and assigned to Tokyo Electron on January, 2012 by the United States Patent and Trademark Office.
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Patent abstract
The invention provides apparatus and methods for processing substrates using pooled statistically based variance data. The statistically based variance data can include Pooled Polymer De-protection Variance (PPDV) data that can be used to determine micro-bridging defect data, LER defect data, and LWR defect data.
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US Patent 08108805 Simplified micro-bridging and roughness analysis US Patent 8108805 Simplified micro-bridging and roughness analysis
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Patent Number
0810880500
Patent Number
810880500
Edits on 31 Mar, 2023
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
081088050
Date of Patent
January 31, 2012
0Patent Application Number
127323330
Date Filed
March 26, 2010
0Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
081088050
Date of Patent
January 31, 2012
0Patent Application Number
127323330
Date Filed
March 26, 2010
0Patent Primary Examiner
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US Patent 08108805 Simplified micro-bridging and roughness analysis
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08108805
Date of patent
January 31, 2012
Patent application number
12732333
Date Filed
March 26, 2010
Patent primary examiner
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