US Patent 8126027 Line narrowing module
Patent 8126027 was granted and assigned to Cymer on February, 2012 by the United States Patent and Trademark Office.
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Patent abstract
An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In one application, the apparatus may be used as a line narrowing module for a laser light source.
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Patent Inventor Names
German E. Rylov0
J. Martin Algots0
Richard L. Sandstrom0
Robert A. Bergstedt0
William N. Partlo0
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US Patent 08126027 Line narrowing module US Patent 8126027 Line narrowing module
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Patent Number
081260270
Patent Number
81260270
Edits on 3 Apr, 2023
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
081260270
Date of Patent
February 28, 2012
0Patent Application Number
130868580
Date Filed
April 14, 2011
0Patent Primary Examiner
Edits on 14 Dec, 2021
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US Patent 08126027 Line narrowing module
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08126027
Date of patent
February 28, 2012
Patent application number
13086858
Date Filed
April 14, 2011
Patent primary examiner
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