US Patent 8126027 Line narrowing module
Patent 8126027 was granted and assigned to Cymer on February, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 14, 2011
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Date of Patent
February 28, 2012
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Patent Application Number
13086858
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Patent Citations Received
Patent Inventor Names
Richard L. Sandstrom
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William N. Partlo
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German E. Rylov
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J. Martin Algots
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Robert A. Bergstedt
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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