Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tetsuya Kawajiri0
Tomoyuki Fujii0
Yasufumi Aihara0
Date of Patent
March 6, 2012
0Patent Application Number
118670440
Date Filed
October 4, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate supporting member includes: a plate-shaped ceramic body having a surface serving as a substrate supporting surface; a plate-shaped composite material body which is joined to a surface of the ceramic body opposite to the substrate supporting surface with a joint material interposed therebetween and the plate-shaped composite material body made of porous ceramic with pores filled with metal, the composite material body having a porosity of more than 0% and not more than 5%; and a metallic plate which is joined to a surface of the composite material body opposite to the surface joined to the ceramic body with a joint material interposed therebetween.
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