US Patent 8137463 Dual zone gas injection nozzle
Patent 8137463 was granted and assigned to Applied Materials on March, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 19, 2007
Date of Patent
March 20, 2012
Patent Application Number
11960166
Patent Inventor Names
Philip A. Bottini
0
Hanh D. Nguyen
0
Johanes S. Swenberg
0
Wei Liu
0
Roger Curtis
0
Son T. Nguyen
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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