US Patent 8139340 Conductive seal ring electrostatic chuck
Patent 8139340 was granted and assigned to Plasma-Therm on March, 2012 by the United States Patent and Trademark Office.
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Patent abstract
The present invention provides an improved electrostatic chuck for a substrate processing system. The electrostatic chuck comprising a main body having a top surface configured to support the substrate, a power supply to apply a voltage to the main body and a sealing ring disposed between the main body and the substrate wherein the sealing ring has a conductive layer.
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US Patent 08139340 Conductive seal ring electrostatic chuck US Patent 8139340 Conductive seal ring electrostatic chuck
Infobox
Patent Number
0813934000
Patent Number
813934000
Edits on 23 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
081393400
Date of Patent
March 20, 2012
0Patent Application Number
126897840
Date Filed
January 19, 2010
0Patent Primary Examiner
Edits on 28 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
081393400
Date of Patent
March 20, 2012
0Patent Application Number
126897840
Date Filed
January 19, 2010
0Patent Primary Examiner
Edits on 14 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 08139340 Conductive seal ring electrostatic chuck
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08139340
Date of patent
March 20, 2012
Patent application number
12689784
Date Filed
January 19, 2010
Patent primary examiner
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