US Patent 8139340 Conductive seal ring electrostatic chuck
Patent 8139340 was granted and assigned to Plasma-Therm on March, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 19, 2010
Date of Patent
March 20, 2012
Patent Application Number
12689784
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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