Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Deodatta Vinayak Shenai-Khatkhate0
Qin-Min Wang0
Stephen J. Manzik0
Date of Patent
March 27, 2012
Patent Application Number
12074373
Date Filed
March 3, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
Compositions including an amido-group-containing vapor deposition precursor and a stabilizing additive are provided. Such compositions have improved thermal stability and increased volatility as compared to the amido-group-containing vapor deposition precursor itself. These compositions are useful in the deposition of thin films, such as by atomic layer deposition.
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