US Patent 8158338 Resist sensitizer
Patent 8158338 was granted and assigned to Massachusetts Institute of Technology on April, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 8, 2008
Date of Patent
April 17, 2012
Patent Application Number
12169224
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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