Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chienliu Chang0
Date of Patent
May 1, 2012
0Patent Application Number
123050990
Date Filed
July 18, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
There is provided an etching method of an amorphous oxide layer containing In and at least one of Ga and Zn, which includes etching the amorphous oxide layer using an etchant containing any one of acetic acid, citric acid, hydrochloric acid, and perchloric acid.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
