Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Timothy A. Quick0
Date of Patent
May 29, 2012
0Patent Application Number
127512830
Date Filed
March 31, 2010
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention provides atomic layer deposition systems and methods that include metal compounds with at least one β-diketiminate ligand. Such systems and methods can be useful for depositing metal-containing layers on substrates.
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