Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
July 3, 2012
Patent Application Number
12551180
Date Filed
August 31, 2009
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of etching silicon-and-carbon-containing material is described and includes a SiConi™ etch in combination with a flow of reactive oxygen. The reactive oxygen may be introduced before the SiConi™ etch reducing the carbon content in the near surface region and allowing the SiConi™ etch to proceed more rapidly. Alternatively, reactive oxygen may be introduced during the SiConi™ etch further improving the effective etch rate.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
