Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Rajesh Odedra0
Thomas Leese0
Andrew Kingsley0
Fuquan Song0
Hywel Owen Davies0
Paul Williams0
Peter Nicholas Heys0
Date of Patent
July 17, 2012
Patent Application Number
12207973
Date Filed
September 10, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods of forming titanium-containing films by atomic layer deposition are provided. The methods comprise delivering at least one precursor to a substrate, wherein the at least one precursor corresponds in structure to Formula I:
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