US Patent 8225683 Wafer bow metrology arrangements and methods thereof
Patent 8225683 was granted and assigned to Lam Research on July, 2012 by the United States Patent and Trademark Office.
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Patent abstract
An arrangement for quantifying a wafer bow. The arrangement is positioned within a plasma processing system is provided. The arrangement includes a support mechanism for holding a wafer. The arrangement also includes a first set of sensors, which is configured to collect a first set of measurement data for a plurality of data points on the wafer. The first set of measurement data indicates a minimum gap between the first set of sensors and the wafer. The first set of sensors is positioned in a first location, which is outside of a set of process modules of the plasma processing system.
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Patent Inventor Names
Andrew D. Bailey, III0
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US Patent 08225683 Wafer bow metrology arrangements and methods thereof US Patent 8225683 Wafer bow metrology arrangements and methods thereof
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Patent Number
082256830
Patent Number
82256830
Edits on 22 Apr, 2023
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Current Assignee
Patent Jurisdiction
Patent Number
082256830
Date of Patent
July 24, 2012
0Patent Application Number
122335010
Date Filed
September 18, 2008
0Patent Primary Examiner
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US Patent 08225683 Wafer bow metrology arrangements and methods thereof
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08225683
Date of patent
July 24, 2012
Patent application number
12233501
Date Filed
September 18, 2008
Patent primary examiner
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