Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Junichi Koike0
Hitoshi Itoh0
Kenji Matsumoto0
Koji Neishi0
Date of Patent
August 14, 2012
0Patent Application Number
126315560
Date Filed
December 4, 2009
0Patent Citations Received
Patent Primary Examiner
Patent abstract
On a surface of an object to be treated, a Mn-containing thin film or CuMn-containing alloy thin film is formed by heat treatment (CVD or ALD) by using a Mn-containing source gas (or Mn-containing source gas and a Cu-containing gas) and an oxygen-containing gas (for instance, water vapor) as a processing gas. The Mn-containing thin film or the CuMn-containing alloy thin film can be formed with high step coverage in a fine recess formed on the surface of the object to be treated.
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