US Patent 8243255 Lithographic apparatus and in-line cleaning apparatus
Is a
Date Filed
December 19, 2008
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Date of Patent
August 14, 2012
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Patent Application Number
12318037
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Patent Citations Received
Patent Inventor Names
Hans Jansen
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Bauke Jansen
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Hubertus Leonardus Franciscus Heusschen
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Roelof Frederik De Graaf
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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