Patent attributes
A cleaning system is integrated in an exposure machine including an immersion cover and a workbench arranged to be movable in translation below immersion cover. The cleaning system includes an image acquisition component, a cleaning component, and a controller. The image acquisition component is configured to acquire image information of a through hole of immersion cover. The cleaning component includes a cleaning pipe disposed inside workbench and having a first end extending out of a top surface of workbench, and a vacuum pump connected to a second end of cleaning pipe. The controller is configured to judge whether through hole is blocked according to image information, control workbench to be moved in translation so that first end of cleaning pipe is located directly below blocked through hole, and control vacuum pump to apply a negative pressure to blocked through hole through cleaning pipe to clean immersion cover.
