Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hans Jansen0
Peter Franciscus Wanten0
Robert Douglas Watso0
Teunis Cornelis Van Den Dool0
Anthonius Martinus Cornelis Petrus De Jong0
Antonius Johannus Van Der Net0
Jacques Cor Johan Van Der Donck0
Jan Willem Cromwijk0
...
Date of Patent
March 21, 2017
0Patent Application Number
148798520
Date Filed
October 9, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An immersion lithographic apparatus is cleaned by use of a cleaning liquid consisting essentially of ultra-pure water and (a) a mixture of hydrogen peroxide and ozone, or (b) hydrogen peroxide at a concentration of up to 5%, or (c) ozone at a concentration of up to 50 ppm, or (d) oxygen at concentration of up to 10 ppm, or (e) any combination selected from (a)-(d).
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
