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US Patent 8284560 Eddy current sensor with enhanced edge resolution

Patent 8284560 was granted and assigned to Applied Materials on October, 2012 by the United States Patent and Trademark Office.

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Is a

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Date of Patent

October 9, 2012

Patent Application Number

12616761

Date Filed

November 11, 2009

Patent Citations Received

US Patent 12136574 Technique for training neural network for use in in-situ monitoring during polishing and polishing system

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US Patent 11865664 Profile control with multiple instances of contol algorithm during polishing

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US Patent 12090599 Determination of substrate layer thickness with polishing pad wear compensation

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US Patent 11658078 Using a trained neural network for use in in-situ monitoring during polishing and polishing system

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US Patent 11780045 Compensation for substrate doping for in-situ electromagnetic inductive monitoring

US Patent 11780047 Determination of substrate layer thickness with polishing pad wear compensation

US Patent 11791224 Technique for training neural network for use in in-situ monitoring during polishing and polishing system

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