Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kiran Lall Shrestha
Benjamin Cherian
Kun Xu
Jun Qian
Date of Patent
October 10, 2023
Patent Application Number
17344779
Date Filed
June 10, 2021
Patent Citations
...
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of training a neural network includes obtaining two ground truth thickness profiles a test substrate, obtaining two thickness profiles for the test substrate as measured by an in-situ monitoring system while the test substrate is on polishing pads of different thicknesses, generating an estimated thickness profile for another thickness value that is between the two thickness values by interpolating between the two profiles, and training a neural network using the estimated thickness profile.
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